师资介绍

吴国荣

发布者:姚芳发布时间:2022-10-14浏览次数:1421

吴国荣(1990.08),男,博士,BET体育365投注官网。长期从事微纳结构湿法刻蚀的机理、加工及仿真研究。发表学术论文JMEMSJMM8篇。担任《Journal of Microelectromechanical SystemsIEEE Transactions on Semiconductor Manufacturing》等学术期刊审稿人。

 

 

1.教育经历

2017.09-2022.06东南大学,机械工程学院,博士研究生,导师:幸研教授

2014.09-2017.06江苏科技大学,机械工程学院,硕士研究生,导师:高超教授

2010.09-2014.06江苏师范大学,机电工程学院,本科学士

 

2.工作经历

2022.08-至今,BET体育365投注官网,BET体育365投注官网,讲师

 

3.研究方向

1晶体材料的湿法刻蚀机理

2微纳结构的设计及加工

3微纳结构的湿法刻蚀仿真

 

4.代表性论著

[1] Guorong Wu and Yan Xing. The Model of Etch Rates of Crystallographic Planes of Sapphire Based on Step Flow Mechanism. Journal of Microelectromechanical Systems, 2020, 29(5), 1234-1244. (SCI)

[2] Guorong Wu, Yan Xing, Ye Chen and Zai-Fa Zhou. Application of the evolutionary kinetic Monte Carlo method for the simulation of anisotropic wet etching of sapphire. Journal of Micromechanics and Microengineering, 2021, 31, 065001. (SCI)

[3] Guorong Wu, Miguel A. Gosalvez and Yan Xing. Evolutionary Kinetic Monte Carlo Simulation of Anisotropic Wet Etching of Sapphire at Different Concentrations and Temperatures. Journal of Microelectromechanical Systems, 2022, 31(2), 249-264. (SCI)

[4] Guorong Wu, Yan Xing, Ye Chen and Zai-Fa Zhou. Analysis of etch profiles on C-plane wafers in wet etching of sapphire based on undercutting rate distributions in mixture of H2SO4 and H3PO4 at 236ºC. ECS Journal of Solid State Science and Technology, 2022, 11, 036003. (SCI)

[5] Guorong Wu, Yan Xing, Chen Fang, Jiabao Yao and Xiaohui Lin. Atomic structure method for the calculation of anisotropic wet etching rate of sapphire crystal. 33rd IEEE International Conference on Micro Electro Mechanical Systems (MEMS), 2020, 913-916. (EI)

[6] Yan Xing, Zhiyue Guo, Miguel A. Gosalvez, Guorong Wu and Xiaoli Qiu. Characterization of anisotropic wet etching of single-crystal sapphire. Sensors and Actuators A: Physical, 2020, 303, 111667. (SCI)

[7] Xi Lin, Chen Fang, Haoyang Liu, Guorong Wu, Yan Xing. Characterization and simulation of sputtering etched profile by focused gallium ion beam on GaN substrate. Materials & Design, 2022, 216, 110563. (SCI)

[8] Yan Xing, Zhiyue Guo, Guorong Wu and Miguel A. Gosalvez. Characterization of Orientation-Dependent Etching Properties and Surface Morphology of Sapphire Crystal in Wet Etching. 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII), 2019, 281-284. (EI)

 

5.授权专利

[1] 一种用于加工氧化铝陶瓷的高质量烧结金刚石钻头及其制备方法(专利号:ZL201810493082.6,已授权)

发明人:幸研,吴国荣,方晨

 

6.联系方式

E-mail: wuguorongtz@qq.com


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